Four - Probe Method for Measure

Summarize

Resistivity is an important parameter that determines the electrical properties of semiconductor materials. In order to characterize the quality of the process and the doping of materials, it is necessary to test the resistivity of materials.There are many methods to measure the resistivity of semiconductor materials, among which the four-probe method is characterized by simple equipment, easy operation, high measurement accuracy and no strict requirements on the sample shape.Therefore, at present, four probe is the most common method to detect the resistivity of semiconductor materials, especially for thin film samples.

The four-probe method developed by xigu technology is used to measure the resistivity of semiconductor. It adopts the high-precision source meter (SMU) of keaishili company, which can test the voltage when the current is output and the current when the voltage is output.The output current ranges from picoampere-level to ampere-level with controllable measurement voltage resolution up to microvolt level.Support four-wire kelvin mode, suitable for four-probe test, can simplify the test connection, get accurate test results.

The upper computer software CycleStar guides the resistivity test steps, and the test method is clear and clear. Even unskilled engineers can quickly master the test method.

Built-in resistivity calculation formula, directly read the calculation results from the computer end after the test, convenient and flexible to do follow-up processing analysis system is mainly composed of source measurement unit, probe station and upper computer software.The four probes can be connected to the source table through either the front panel banana head or the back panel triaxial interface.